SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

摘要

A semiconductor device includes a substrate which includes a cell region and a connection region. Gate electrodes are vertically stacked on the cell region of the substrate. Pads to be electrically connected to a peripheral circuit are horizontally extended from the gate electrodes to the connection region. The pads form a step structure on the connection region and are electrically connected to contact plugs with different vertical lengths. The pads have thicker regions than the gate electrodes.