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发明名称
分离式闸极记忆体元件及其制造方法;SPLIT GATE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
摘要
本揭露系有关于一种分离式闸极记忆体元件以及其制造方法,其比起传统基线制程(traditional baseline processes)需要较少的制程步骤。字元闸极(word gate)/选择闸极(select gate;SG)对被形成于一牺牲间隔周围。所得到的SG结构具有一可分辨的非平面的顶表面。覆盖选择闸极的间隔层也依循SG顶表面的形状。一介电质设置于闸极间介电层(inter-gate dielectric layer)上方,且配置于每一个记忆体闸极和选择闸极的相邻侧壁之间以提供他们之间的隔离。
申请公布号
TW201539723
申请公布日期
2015.10.16
申请号
TW103146200
申请日期
2014.12.30
申请人
台湾积体电路制造股份有限公司 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
发明人
吴常明 WU, CHANG MING;吴伟成 WU, WEI CHENG;刘世昌 LIU, SHIH CHANG;庄 学理 CHUANG, HARRY-HAK-LAY;蔡嘉雄 TSAI, CHIA SHIUNG
分类号
H01L27/115(2006.01);H01L29/788(2006.01);H01L29/423(2006.01);H01L21/28(2006.01)
主分类号
H01L27/115(2006.01)
代理机构
代理人
洪澄文颜锦顺
主权项
地址
新竹市新竹科学工业园区力行六路8号 TW
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