| 摘要 |
Provided is a laser lift-off apparatus with a structure for preventing an issue generated by a protruding member from a work involving a lift-off for a small work. In the present invention: a support substrate (S2) with a chip-shaped work (W) attached, which is made of a sapphire substrate (S1) and a material layer (M), is put on a work stage (4); and, a laser beam from a laser source (1) is irradiated by a projecting lens (2) through a mask (21) to the chip-shaped work (W). The arrived position of the sapphire substrate (S1) coming from the chip-shaped work (W) in case of a lift-off is regulated by an arrived position regulating member. Accordingly, issues due to the arrival of the sapphire substrate (S1) are prevented. |
