INSPECTION DEVICE AND INSPECTION CONDITION DETERMINATION METHOD

摘要

This inspection device is provided with a storage device for storing a model for estimating optical constant and microroughness information from a scattered light distribution, an estimation unit for fitting a scattered light distribution obtained from a plurality of detection systems to the model and estimating the optical constant and microroughness information, and an inspection condition determination unit for determining an inspection condition using the estimated optical constant and microroughness information or information calculated using the estimated optical constant and microroughness information.