| 摘要 |
PROBLEM TO BE SOLVED: To provide moving elements traveling responsive to an electrostatic force.SOLUTION: An actuator apparatus is provided that includes at least one actuator device and controller 50. Each actuator device includes an array 100 of moving elements and at least one electrode. Each individual moving element, in response to an individual first electrostatic force operative on each individual moving element, travels along a respective axis alternately back and forth, and is driven away from its at rest position solely by the first electrostatic force. The controller 50 receives a digital input signal sampled periodically in accordance with a sampling clock, and is operative to control at least one of the at least one electrode and the individual moving element to apply the sequence of potential differences to generate a physical effect. |
