SUBSTRATE STORING CONTAINER

摘要

The lid body side wafer support parts allow flexibility to be exhibited and supports the wafers. If a closed state substrate is defined as being a wafer which is stored in the substrate storing space in a container main body in a state wherein the container main body opening portion is closed by the lid body, and a closed time center is defined as being the center of a closed state substrate, the back side substrate support portion, when a closed state substrate is viewed in the thickness direction, are disposed in a pair about a depth direction reference line and support the wafer. A center angle which the back side substrate support portion form toward the depth direction with respect to a left/right direction reference line when a closed state substrate is viewed in the thickness direction is 20-55°.

主权项

1. A substrate storing container comprising:
a container main body having formed inside thereof a substrate storing space that can store a plurality of substrates, and having formed at one end portion thereof a container main body opening portion that is in communication with the substrate storing space; a lid body that is removably attached to the container main body opening portion and can close the container main body opening portion; a lid body side substrate support portion which is arranged at a portion of the lid body that is a part opposing the substrate storing space when the container main body opening portion is closed by the lid body, and can support edge portions of the plurality of substrates when the container main body opening portion is closed by the lid body; and a back side substrate support portion that is arranged so as to form a pair with the lid body side substrate support portion inside the substrate storing space, that can support the edge portions of the plurality of substrates, and that supports the plurality of substrates in cooperation with the lid body side substrate support portion when the container main body opening portion is closed by the lid body, wherein the lid body side substrate support portion allows flexibility to be exhibited and supports a substrate, wherein, in a case in which a direction from one end portion of the container main body toward the other end portion with respect to the one end portion refers to a depth direction, a substrate being stored in the substrate storing space of the container main body in a state in which the container main body opening portion is closed by the lid body refers to a closed state substrate, a center of the closed state substrate refers to a closed time center, a virtual straight line passing though the closed time center and in parallel to the depth direction refers to a depth direction reference line, and a virtual straight line passing through the closed time center and perpendicular to the depth direction refers to a left/right direction reference line, when viewing the closed state substrate in the thickness direction, the back side substrate support portion is provided so as to form a pair interposing the depth direction reference line to support a substrate, and wherein a center angle that the back side substrate support portion makes with respect to the left/right direction reference line toward the depth direction, when viewing the closed state substrate in a thickness direction, is at least 20° and no more than 55°.