| 摘要 |
Provided are a graphene-based electro-absorption optical modulator and a method for manufacturing same. The optical modulator is fabricated on a substrate (10), comprising a graphene-based long-range SPP waveguide structure, a first electrode (301), a second electrode (302), an optical input terminal, and an optical output terminal; the graphene-based long-range SPP waveguide structure comprises, sequentially formed on the substrate (10), a first high refractive index material layer (201), a first graphene layer (202), a first low refractive index material layer (203), a metal film layer (204), a second low refractive index material layer (205), a second graphene layer (206), and a second high refractive index material layer (207). The optical modulator is based on two waveguide structures - a long-range SPP waveguide and a dielectric loaded SPP waveguide - and therefore has the advantages of large modulation depth, small insertion loss, high quality factor, and strong limiting effect on the light field. The method for manufacturing the graphene-based electro-absorption optical modulator is simple and suitable for large-scale production. |
