SENSOR ARRAY CHIP WITH PIEZOELECTRIC TRANSDUCER INCLUDING INKJET FORMING METHOD

摘要

A method of forming a functionalized sensor array includes providing a substrate having at least one sensor array chip including a plurality of sensor structures. The sensor structures include a piezoelectric layer interposed between upper and lower electrodes and positioned across an area of the sensor array chip in a spatial arrangement. An inkjet cartridge chip is also provided having a plurality of microfluidic channels including a fill side having a plurality of fill side orifices and a dispense side having a plurality of dispense nozzles, wherein two or more of the plurality of microchannels are loaded with different sensing materials, and wherein locations of the plurality of dispense nozzles are matched to the spatial arrangement. The plurality of dispense nozzles are aligned to the plurality of sensor structures, and the plurality of dispense nozzles are actuated to deposit the different sensing materials on the plurality of sensor structures.

主权项

1. A method of forming a functionalized sensor array, comprising:
providing a substrate having at least one sensor array chip including a plurality of sensor structures, said plurality of sensor structures including a piezoelectric layer interposed between upper and lower electrodes and positioned across an area of said sensor array chip in a spatial arrangement; providing an inkjet cartridge chip having a plurality of microchannels including a fill side having a plurality of fill side orifices and a dispense side having a plurality of dispense nozzles, wherein two or more of said plurality of microchannels are loaded with different sensing materials, and wherein locations of said plurality of dispense nozzles are matched to said spatial arrangement; aligning said plurality of dispense nozzles to said plurality of sensor structures, and actuating said plurality of dispense nozzles to deposit said different sensing materials on said plurality of sensor structures.