INSPECTION DEVICE AND INSPECTION METHOD

摘要

To provide a technique for improving a detection precision of the inspection device. The inspection device 100 includes an irradiation unit 101 that irradiates a beam by pulse oscillation onto a surface of the sample from a laser light source, a detection unit 102 on which light from the surface of the sample by the irradiation is made incident to generate and output a detection signal, and a detection control unit 104 that generates a gate signal (G) for controlling an input/output of the detection unit 102 in synchronization with a timing of the pulse oscillation of the irradiation unit 101, and applies the gate signal (G) to the detection unit 102. The detection unit 102 allows the light to be made incident thereon at a timing in accordance with the gate signal (G), and generates and outputs a detection signal.

主权项

1. An inspection device that measures and inspects a state of a sample comprising:
an irradiation unit that irradiates a beam by pulse oscillation onto a surface of the sample from a laser light source; a detection unit on which light from the surface of the sample by the irradiation is made incident to generate and output a detection signal; a first synchronization unit that generates a first clock signal in synchronization with an ON/OFF timing of the pulse oscillation of the irradiation unit; a detection control unit that generates a first signal for controlling an input/output of the detection unit based upon the first clock signal, and applies the first signal to the detection unit, a sampling unit that samples a detection signal from the detection unit; and a second synchronization unit that applies a second signal that is made synchronized with the first clock signal or the first signal to the sampling unit, so as to be made synchronized, with the detection unit, wherein the detection unit generates and outputs the detection signal based upon the first signal in a case where the pulse oscillation is ON, and the sampling unit samples the detection signal based upon the second signal.