发明名称 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 To provide a semiconductor device capable of achieving a higher withstand voltage. Provided is a semiconductor device that has: a p-type fourth region in contact with a lower end of a gate trench; a termination trench that is formed in the front surface of the semiconductor substrate, said termination trench being on the outer side of a second region; a p-type lower end p-type region in contact with a lower end of the termination trench; a p-type side surface p-type region, which is in contact with the termination trench side surface on the outer peripheral side, and which is connected to the lower end p-type region, said p-type side surface p-type region being exposed from the front surface of the semiconductor substrate; and a plurality of p-type guard ring regions, which are formed further toward the outer peripheral side than the side surface p-type region, and which are exposed from the front surface.
申请公布号 WO2015156024(A1) 申请公布日期 2015.10.15
申请号 WO2015JP53693 申请日期 2015.02.10
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA;DENSO CORPORATION 发明人 TAKAYA HIDEFUMI;SAITO JUN;SOENO AKITAKA;YAMAMOTO TOSHIMASA;SOEJIMA NARUMASA
分类号 H01L29/78;H01L21/336;H01L29/06;H01L29/12 主分类号 H01L29/78
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