发明名称 POLARIZATION MODULATING OPTICAL ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a polarization modulating optical element that affects polarization of light rays.SOLUTION: A polarization modulating optical element 301 consists of optically active material having a thickness profile, where the thickness is measured in a direction of an optical axis (in parallel with an element axis EA in a figure provided) and varies over an area of the optical element. In this polarization modulating optical element 301, a plane of oscillation of a first linearly polarized light ray and a plane of oscillation of a second linearly polarized light ray are rotated, respectively, by a first angle of rotation and a second angle of rotation, which are different from each other.
申请公布号 JP2015180936(A) 申请公布日期 2015.10.15
申请号 JP20150077668 申请日期 2015.04.06
申请人 CARL ZEISS SMT GMBH 发明人 FIOLKA DAMIAN;DEGUENTHER MARKUS
分类号 G02B5/30;G02B1/08;G02B27/28;G02F1/01;G03F7/20 主分类号 G02B5/30
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