RESIN CONTAINER COATING DEVICE

摘要

A resin container coating device of the present invention includes a plurality of chambers storing a plurality of resin containers respectively in independent states, a plurality of internal electrodes in which gas conductive parts for conducting a source gas are formed to inner peripheral parts thereof and which are respectively inserted inside the plurality of resin containers stored in the chambers, a gas supply unit for supplying the source gas to the plurality of chambers, a high frequency power source for supplying a high frequency electric power to the plurality of chambers, and an electric power switching part capable of switching a supply designation of the high frequency electric power, which is supplied from the high frequency power source, from first and second chambers forming a first unit to third and fourth chambers forming a second unit.

主权项

1. A resin container coating device comprising:
a plurality of chambers serving as a plurality of outer electrodes which are mutually electrically independent and storing a plurality of resin containers respectively in independent states; a plurality of internal electrodes which are electrically grounded and formed in a tubular shape, in which gas conductive parts for conducting a source gas are formed to inner peripheral parts thereof, and which are respectively inserted inside the plurality of resin containers stored in the chambers; a gas supply unit for supplying the source gas to the plurality of chambers; a high frequency power source for supplying a high frequency electric power to the plurality of chambers; and an electric power switching part capable of switching a supply designation of the high frequency electric power, which is supplied from the high frequency power source, from a part of the plurality of chambers to another chamber.