| 摘要 |
An ion source comprises: a magnetic field unit, and an electrode. One side of the magnetic field unit facing an object to be treated is opened, and the other side of the magnetic field unit is closed. A plurality of stimuli are alternately arranged by being spaced in the opened one side. An accelerative closed loop of a plasma electron is formed in the opened one side by being connected to a magnetic core in the closed other side. The electrode is insulated and spaced from the magnetic field unit in a lower part of the accelerative closed loop of the magnetic field unit. The electrode comprises a cooling water tube, and a reaction gas tube inside the electrode, and has a gas ejection unit connected to the reaction gas tube and the opened one side. The ion source having described configuration supplies the object to be treated by forming gas flow by ionizing reaction gas supplied from the outside. |
