发明名称 A BASE MOLD AND METHOD OF FABRICATING A MOLD
摘要 The present invention relates to a base mold and a method for manufacturing a mold and, more specifically, to a method for manufacturing a mold, which includes: forming a first film and a second film, which are sequentially laminated on a substrate by being separated to each other; forming a first pattern by patterning the first film; forming a first spacer on both lateral walls of the first pattern; forming a second pattern by etching the first spacer and the second membrane by means of an etching mask; forming a laminating structure body including the first pattern and the second pattern on the substrate by removing the first spacer; and forming a mold membrane covering the laminating structure body.
申请公布号 KR20150116002(A) 申请公布日期 2015.10.15
申请号 KR20140039956 申请日期 2014.04.03
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 PARK, JONG MOON;PARK, KUN SIK;JUN, DONG SUK;YOO, SEONG WOOK;KIM, SANG GI;LEE, JIN HO
分类号 B29C33/42;H01L21/027 主分类号 B29C33/42
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