发明名称 |
A BASE MOLD AND METHOD OF FABRICATING A MOLD |
摘要 |
The present invention relates to a base mold and a method for manufacturing a mold and, more specifically, to a method for manufacturing a mold, which includes: forming a first film and a second film, which are sequentially laminated on a substrate by being separated to each other; forming a first pattern by patterning the first film; forming a first spacer on both lateral walls of the first pattern; forming a second pattern by etching the first spacer and the second membrane by means of an etching mask; forming a laminating structure body including the first pattern and the second pattern on the substrate by removing the first spacer; and forming a mold membrane covering the laminating structure body. |
申请公布号 |
KR20150116002(A) |
申请公布日期 |
2015.10.15 |
申请号 |
KR20140039956 |
申请日期 |
2014.04.03 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
PARK, JONG MOON;PARK, KUN SIK;JUN, DONG SUK;YOO, SEONG WOOK;KIM, SANG GI;LEE, JIN HO |
分类号 |
B29C33/42;H01L21/027 |
主分类号 |
B29C33/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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