| 摘要 |
The present invention relates to a gas cylinder information providing system for a semiconductor manufacturing process, provided in a cabinet, by using a short-range communications. The gas cylinder information system for a semiconductor manufacturing process by using a short-range communications of the present invention comprises: a radio frequency identification tag attached to a gas bottle and for storing gas information; a wireless transceiver including a reader module for collecting gas information stored in the radio frequency identification tag, and a writer module for transmitting gas information received from the reader module; and a controller including a wireless identification reader for receiving gas information stored in the wireless transceiver according to proximity wherein the controller displays received gas information. |
