ROTARY JOINT AND POLISHING APPARATUS

摘要

The invention suppresses generation of noises attributable to rotation of a rotary joint.;A rotary joint 160 includes a rotating body 1600 that rotates on a rotating axis A, a housing 1620 disposed so as to surround the rotating body 1600, and at least one bearing 1630 disposed between the rotating body 1600 and the housing 1620 and adapted to support rotation of the rotating body 1600. The rotary joint 160 supplies fluids through fluid connection ports formed in the housing 1620 and fluid passages formed inside the rotating body 1600 to a polishing table having attached thereto a polishing pad for polishing a substrate or a holding portion that is adapted to hold the substrate while pressing the substrate against the polishing pad. At least one elastic member 1640 is interposed at least either between the rotating body 1600 and the at least one bearing 1630 or between the housing 1620 and the at least one bearing 1630.

主权项

1. A rotary joint comprising:
a rotating body adapted to rotate on a rotating axis; a housing disposed so as to surround the rotating body; and at least one bearing disposed between the rotating body and the housing and adapted to support rotation of the rotating body, the rotary joint being capable of supplying fluids through fluid passages formed inside the rotating body to a polishing table having attached thereto a polishing pad for polishing a substrate, or a holding portion that is adapted to hold the substrate while pressing the substrate against the polishing pad, wherein at least one elastic member is interposed at least either between the rotating body and the at least one bearing or between the housing and the at least one bearing.