ELECTRONIC DEVICE HAVING A TERMINATION REGION INCLUDING AN INSULATING REGION

摘要

An electronic device can include an electronic component and a termination region adjacent to the electronic component region. In an embodiment, the termination region can include an insulating region that extends a depth into a semiconductor layer, wherein the depth is less than 50% of the thickness of the semiconductor layer. In another embodiment, the termination region can include a first insulating region that extends a first depth into the semiconductor layer, and a second insulating region that extends a second depth into the semiconductor layer, wherein the second depth is less than the first depth. In another aspect, a process of forming an electronic device can include patterning a semiconductor layer to define a trench within termination region while another trench is being formed for an electronic component within an electronic component region.

主权项

1. An electronic device comprising:
an electronic component region; and a termination region adjacent to the electronic component region and including:
a substrate;a vertical region overlying the substrate;a semiconductor layer having a thickness, a primary surface and an opposite surface, wherein:
the semiconductor layer overlies the substrate; andthe substrate is closer to the opposite surface than the primary surface; andan insulating region that extends a depth into the semiconductor layer, wherein the depth is less than 50% of the thickness of the semiconductor layer.