发明名称 |
LIGHT WAVE SEPARATION LATTICES AND METHODS OF FORMING LIGHT WAVE SEPARATION LATTICES |
摘要 |
Light wave separation lattices and methods of formation are provided herein. In some embodiments, a light wave separation lattice includes a first layer having the formula ROXNY, wherein the first layer has a first refractive index; and a second layer, different from the first layer, disposed atop the first layer, and having the formula R′OXNY, wherein the second layer has a second refractive index different from the first refractive index, and wherein R and R′ are each one of a metal or a dielectric material. In some embodiments, a method of forming a light wave separation lattice includes depositing a first layer having a predetermined desired refractive index atop a substrate by a physical vapor deposition process; and depositing a second layer, different from the first layer, atop the first layer, wherein the second layer has a predetermined second refractive index different from the first refractive index. |
申请公布号 |
US2015293363(A1) |
申请公布日期 |
2015.10.15 |
申请号 |
US201414291712 |
申请日期 |
2014.05.30 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
DIEHL DANIEL LEE;CAO YONG;ZHU MINGWEI;CHEN TAI-CHOU PAPO |
分类号 |
G02B27/10;C23C14/06;G02B5/28 |
主分类号 |
G02B27/10 |
代理机构 |
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代理人 |
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主权项 |
1. A light wave separation lattice, comprising:
a first layer having a formula ROXNY, wherein the first layer has a first refractive index; and a second layer, different from the first layer, disposed atop the first layer, and having a formula R′OXNY, wherein the second layer has a second refractive index different from the first refractive index, wherein R and R′ are each one of a metal or a dielectric material. |
地址 |
Santa Clara CA US |