METHOD AND DEVICE FOR DETERMINING OPTICAL PROPERTIES BY SIMULTANEOUS MEASUREMENT OF INTENSITIES AT THIN LAYERS USING LIGHT OF SEVERAL WAVELENGTHS

摘要

PROBLEM TO BE SOLVED: To provide a method for determining optical properties by measuring intensities at a thin layer.SOLUTION: In a method of the invention, light is directed into a thin layer and first passes through a beam splitter. The beam splitter directs a first part of the light onto the thin layer and another part of the light onto a high-resolution reference detector. Interference of the light in at least one thin layer is detected via a high-resolution detector and forwarded to an evaluating unit. The evaluating unit determines the reflection and/or transmission coefficients, which are correlated with the optical layer thickness through a comparison using at least one database stored in the evaluating unit. The optical layer thickness is obtained as a gray value modification by way of a gray scale value analysis and a conversion factor stored in the at least one database. A corresponding device and intended uses of the method and device are also described.