PECVD COATING USING AN ORGANOSILICON PRECURSOR

摘要

PROBLEM TO BE SOLVED: To provide an improved fabrication method for coated vessels.SOLUTION: A method for coating a substrate surface by PECVD is provided. The method comprises generating a plasma from a gaseous reactant comprising an organosilicon precursor and optionally O. The lubricity, hydrophobicity and/or barrier properties of the coating are determined by setting the ratio of the Oto the organosilicon precursor in the gaseous reactant, and/or by setting the electric power used for generating the plasma. In particular, a lubricity coating made by the method is provided. Vessels coated by the method and the use of such vessels protecting a compound or composition contained or received in the coated vessel against mechanical and/or chemical effects of the surface of the uncoated vessel are also provided.