SYMMETRIC CHAMBER BODY DESIGN ARCHITECTURE TO ADDRESS VARIABLE PROCESS VOLUME WITH IMPROVED FLOW UNIFORMITY/GAS CONDUCTANCE

摘要

The present disclosure generally relates to process chambers having modular design to provide variable process volume and improved flow conductance and uniformity. The modular design according to the present disclosure achieves improved process uniformity and symmetry with simplified chamber structure. The modular design further affords flexibility of performing various processes or processing substrates of various sizes by replacing one or more modules in a modular process chamber according to the present disclosure.

主权项

1. An apparatus for processing a substrate, comprising:
a process module enclosing a process region; a flow module connected to the process module, wherein the flow module defines evacuation channels and an atmosphere volume, and the evacuation channels connect the process region of the process module and an exhaust system attached to the flow module; and a substrate support assembly comprising a support plate and a shaft, wherein the support plate is disposed in the process region to support a substrate therein, and the shaft extends from the processing region of the process module to the atmosphere volume of the flow module.