发明名称 ANTI-SLIP END EFFECTOR FOR TRANSPORTING WORKPIECE USING VAN DER WAALS FORCE
摘要 An anti-slip end effector for transporting a workpiece, configured to be attached to a robotic arm, includes: a workpiece-supporting area for placing a workpiece thereon for transportation; and at least one anti-slip protrusion disposed in the workpiece-supporting area for supporting a backside of the workpiece, said anti-slip protrusion having a top face capable of contacting and adhering to the backside of the workpiece by van der Waals force and capable of pivoting on a pivot axis, said pivot axis being disposed away from a center of the top face as viewed from above.
申请公布号 KR20150115661(A) 申请公布日期 2015.10.14
申请号 KR20150047078 申请日期 2015.04.02
申请人 ASM IP HOLDING B.V. 发明人 ARAI IZUMI
分类号 H01L21/677 主分类号 H01L21/677
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