TRANSFER ARM AND APPARATUS FOR TRANSFERRING SUBSTRATE

摘要

The present invention relates to a transfer arm, and a substrate transfer device having the same. The transfer arm comprises: a support hand to support substrates; an arm unit to which the support hand is coupled to be rotated; an arm base to which the arm unit is coupled to be rotated; a first driving part to rotate a first arm tool which the arm unit has to move the support hand; a second driving part to rotate a second arm tool which the arm unit has to move the support hand; and a control part to control the first driving part and the second driving part with a first driving mode to rotate the first and second arm tools at a first speed ratio, and a second driving mode to rotate the first and second arm tools at a second speed ratio different to the first speed ratio such that the support hand moves in parallel with a driving direction. According to the present invention, the support hand moves towards the substrates escaped from a reference position by controlling the first and second driving parts; thereby uniformly supporting the substrates escaped from the reference position with the support hand to prevent damage to the substrates while the substrates are transferred.