| 摘要 |
The present invention relates to a driving device for a substrate-transferring robot comprising: a transfer driving part for transferring a supporting hand for supporting a substrate; a lift driving part for driving a lifting arm for vertically lifting the supporting hand so that the height of the position of the supporting hand can be changed; a rotation driving part for driving a rotation part for rotating the lifting arm so that the orientation of the supporting hand can be changed; a travel driving part for driving a travel part for moving the rotation part in a traveling direction; an eccentric travel correction calculating part for calculating an eccentric travel correction value from a target value; and a control part for generating driving angles for the transfer driving part, the lift driving part, the rotation driving part and the travel driving part depending on a set target position by distributing the eccentric travel correction value, which has been calculated by the eccentric travel calculating part, to a first eccentric travel direction, which is parallel to a vertical direction, and a second eccentric travel direction, which is perpendicular to the first eccentric travel direction, wherein the control part distributes the eccentric travel correction value to one or more among the lift driving part, the transfer driving part and the travel driving part with respect to the first eccentric travel direction, and to one or more among the rotation driving part, the transfer driving part and the travel driving part with respect to the second eccentric travel direction. According to the present invention, the productivity and the yield rate of electronic components can be improved by reducing time required to transfer a substrate as the speed of moving the supporting hand can be increased while simultaneously reducing the degree of eccentric travel in the process of transferring a substrate using the supporting hand. |
