酸素含有量が低いＣｕ−Ｇａ系合金スパッタリングターゲット材

摘要

PROBLEM TO BE SOLVED: To provide a low-oxygen Cu-Ga-based alloy sputtering target material for manufacturing a light absorption thin layer of a solar battery.SOLUTION: A Cu-Ga-based alloy sputtering target material includes, in atom %, Ga in 25% or more and 40% or less, balance Cu, and inevitable impurities. An oxygen content is less than 250 ppm, and the crystal grain size is more than 10μm and equal to or less than 35μm.