发明名称 光電変換装置の作製方法
摘要 <p>A photoelectric conversion device with a novel anti-reflection structure. In the photoelectric conversion device, a front surface of a semiconductor substrate which serves as a light-receiving surface is covered with a group of whiskers (a group of nanowires) so that surface reflection is reduced. In other words, a semiconductor layer which has a front surface where crystals grow so that whiskers are formed is provided on the light-receiving surface side of the semiconductor substrate. The semiconductor layer has a given uneven structure, and thus has effects of reducing reflection on the front surface of the semiconductor substrate and increasing conversion efficiency.</p>
申请公布号 JP5792523(B2) 申请公布日期 2015.10.14
申请号 JP20110132813 申请日期 2011.06.15
申请人 发明人
分类号 H01L31/18;C01B33/02;C23C16/24;H01L31/0236 主分类号 H01L31/18
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