| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an interference measuring device to be easily adjusted. <P>SOLUTION: First and second partial regions are extracted from a whole region where an image sensor receives light. Intensity of interference light received at each of the extracted first and second partial regions is obtained at a plurality of times. When one and the other of the intensity at each time are defined as X coordinate value and Y coordinate value, respectively, a difference between a maximal value and a minimum value of the Y coordinate value is calculated as a first difference A. After an inclinationα, where data of a combination of the X coordinate value and the Y coordinate value is approximated by a linear function, is calculated, an XY coordinate system is rotated so that the inclination becomes zero. A difference between a maximal value and a minimum value of the Y coordinate value in the XY coordinate system after rotation is calculated as a second difference B'. An angleδrepresented byδ=a sinä(B'/cosα)/A} is calculated so that the angleδis determined as an index that indicates uniformity of phase distribution of the interference light. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
