ROTATING APPARATUS AND APPARATUS FOR TRANSFERRING SUBSTRATE COMPRISING THE SAME

摘要

The present invention relates to a rotating device for a substrate transfer apparatus and to a substrate transfer apparatus including the same, wherein the rotating device for a substrate transfer apparatus comprises: a rotating frame rotating around a rotational axis to change the orientation of a transfer arm for transferring a substrate; a driving part including a driving axis rotating at a first rotating speed to rotate the rotating frame; and a decelerator including an input axis rotating at the first rotating speed together with the driving axis and an output axis rotating the rotational axis at a second rotating speed, wherein the driving axis and the input axis are directly connected to each other. According to the present invention, a space occupied by the substrate transfer apparatus can be reduced and power consumed by the substrate transfer apparatus can be reduced by connecting the driving part and the decelerator in series to reduce the size of the rotating frame.