发明名称 ナノワイヤの作製方法
摘要 PROBLEM TO BE SOLVED: To form nanowire of a group III-V compound on graphene.SOLUTION: In a step S101, metallic particulates 102 are formed on graphene 101. Graphene 101 may be formed on a substrate 103 composed of SiC having, e.g., a main surface of (0001) by a thermal decomposition method. In a step S102, a nanowire 104 of the group III-V compound is formed by an organometallic vapor phase growing method using the metallic particulates 102 as a catalyst (nanowire formation step). For instance, the nanowire 104 composed of GaP can be formed by the organometallic vapor phase growing method for supplying Ga source gas and P source gas.
申请公布号 JP5795527(B2) 申请公布日期 2015.10.14
申请号 JP20110278258 申请日期 2011.12.20
申请人 日本電信電話株式会社 发明人 舘野 功太;章 国強;佐々木 智;日比野 浩樹
分类号 C01B25/08;B01J23/52;B82Y20/00;B82Y30/00;B82Y40/00;C01G28/00;H01L31/10;H01L33/04 主分类号 C01B25/08
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