| 摘要 |
A roller-type depressing device that can depress an object like a die or a molding target by controlling the pressure of a roller, an imprint device and an imprint method utilizing the same are provided. A roller-type depressing device is to depress the object like a die 1 or a molding target 2 by a main roller 38, and includes a pressure adjusting plate provided with the main roller 38, a roller moving unit that moves the main roller 38 relative to the object, a pressure adjusting unit that holds the pressure adjusting plate 332 in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate 332 acts on the main roller 38, a pressure receiving stage 322 receiving pressure of the main roller 38 via the object, a pressure adjuster that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate 332, and a pressure equalizer (backup rollers 39) that equalizes, in an axial direction thereof, pressure applied to the object by the main roller 38. |
