| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To bond an adhesive sheet to an adherend while preventing scratches on the adhesive sheet and irregularities appearing on a surface of the adhesive sheet. <P>SOLUTION: A sheet bonding apparatus includes: first supporting means 11 supporting an adhesive sheet AS; second supporting means 16 supporting an adherend WK at a position facing the adhesive sheet; decompression chamber formation means 12 housing the first supporting means 11 and the second supporting means 16 and forming a decompression chamber CH1; decompression means 13 decompressing the decompression chamber CH1; and pressing means 14 bonding the adhesive sheet AS to the adherend WK. The pressing means 14 includes outer edge pressing means 50A forming a pressure adjustment chamber CH2, in which a pressure is adjusted independently from the decompression chamber CH1, between itself and the adherend or the adhesive sheet and causes the pressure adjustment chamber CH2 to be in the high pressure state relative to the decompression chamber CH1 thereby bonding the adhesive sheet AS to the adherend WK. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
