Solid-state imaging device and manufacturing method of the same

摘要

According to one embodiment, there is a solid-state imaging device including an imaging region. In the imaging region, a plurality of pixels are arranged two-dimensionally. A first inclination angle of a light incidence surface of a dichroic filter in a first pixel among the plurality of pixels relative to a normal to a surface of a semiconductor substrate and a second inclination angle of a light incidence surface of a dichroic filter in a second pixel located farther from a center of the imaging region than the first pixel among the plurality of pixels relative to the normal are decided on so as to make, for light incident on the imaging region, a filter property of the dichroic filter in the first pixel and a filter property of the dichroic filter in the second pixel equalized.

主权项

1. A solid-state imaging device comprising an imaging region where a plurality of pixels are arranged two-dimensionally, each of the plurality of pixels corresponding to at least two colors,
wherein each of the plurality of pixels includes: a first photoelectric conversion portion; a second photoelectric conversion portion; a micro-lens; and a dichroic filter that transmits light of a first color out of light having passed through the micro-lens to guide the light of the first color to the first photoelectric conversion portion and reflects light of a second color to guide the light of the second color to the second photoelectric conversion portion, and wherein a first inclination angle of a light incidence surface of the dichroic filter in a first pixel among the plurality of pixels relative to a normal to a surface of a semiconductor substrate and a second inclination angle of a light incidence surface of the dichroic filter in a second pixel located farther from a center of the imaging region than the first pixel among the plurality of pixels relative to the normal are set on so as to make, for light incident on the imaging region, a filter property of the dichroic filter in the first pixel and a filter property of the dichroic filter in the second pixel equalized.