Process for producing a target by thermal spraying

摘要

Process for producing a target by thermal spraying, especially by plasma spraying, said target comprising at least one compound chosen from refractory metals, resistive oxides and volatile oxides, characterized in that at least one fraction of said compound in the form of a powder composition of said compound is sprayed by thermal spraying, onto at least one surface portion of the target, in a controlled atmosphere and in that powerful cryogenic cooling jets directed onto the target during its construction are used.

主权项

1. A process comprising:
(A) thermal spraying at least one compound onto at least one surface portion of a target support with a plasma torch, thereby forming a target on the target support, wherein the target comprises the compound, wherein the compound is at least one selected from the group consisting of a refractory metal, a resistive oxide and a volatile oxide, wherein at least one fraction of the compound is a powder composition, and wherein the thermal spraying is performed in a controlled atmosphere; and (B) directing powerful cryogenic cooling jets onto the target during the thermal spraying in (A), wherein the cryogenic cooling jets are distributed around the torch.