Method for producing graphene, and graphene

摘要

A technique for forming graphene which solves problems involved in formation of graphene by a thermal CVD method and a resin carbonization method that a high temperature is used and the treatment time is long and can form graphene at a lower temperature in a shorter time is provided. The above problems are solved by performing hydrogen plasma treatment on a copper foil substrate having an organic substance applied thereon by use of a surface wave microwave plasma treatment device and forming graphene on the copper foil substrate by the hydrogen plasma treatment.

主权项

1. A method for producing graphene, comprising performing a surface wave microwave plasma treatment using hydrogen-containing gas on a metal substrate having an organic substance thereon under a low pressure of 50 Pa or lower while a temperature of the metal substrate having the organic substance thereon inside a surface wave microwave plasma treatment device is set to 500° C. or lower, thereby growing graphene on a surface of the organic substance.