发明名称 Recessed transistors containing ferroelectric material
摘要 Some embodiments include transistor constructions having a first insulative structure lining a recess within a base. A first conductive structure lines an interior of the first insulative structure, and a ferroelectric structure lines an interior of the first conductive structure. A second conductive structure is within a lower region of the ferroelectric structure, and the second conductive structure has an uppermost surface beneath an uppermost surface of the first conductive structure. A second insulative structure is over the second conductive structure and within the ferroelectric structure. A pair of source/drain regions are adjacent an upper region of the first insulative structure and are on opposing sides of the first insulative structure from one another.
申请公布号 US9159829(B1) 申请公布日期 2015.10.13
申请号 US201414508912 申请日期 2014.10.07
申请人 Micron Technology, Inc. 发明人 Ramaswamy Durai Vishak Nirmal
分类号 H01L29/78;H01L29/423 主分类号 H01L29/78
代理机构 Wells St. John P.S. 代理人 Wells St. John P.S.
主权项 1. A transistor construction, comprising: a first insulative structure lining a recess within a base; a first conductive structure lining an interior of the first insulative structure; a ferroelectric structure lining an interior of the first conductive structure; a second conductive structure within a lower region of the ferroelectric structure; the second conductive structure having an uppermost surface beneath an uppermost surface of the first conductive structure; a second insulative structure over the second conductive structure and within the ferroelectric structure; and a pair of source/drain regions adjacent an upper region of the first insulative structure and on opposing sides of the first insulative structure from one another.
地址 Boise ID US