发明名称 Schottky barrier diode and method of manufacturing the same
摘要 A schottky barrier diode includes: an n− type epitaxial layer that is disposed at a first surface of an n+ type silicon carbide substrate; a plurality of n type pillar areas that are disposed at the inside of the n− type epitaxial layer and that are disposed at a first portion of the first surface of the n+ type silicon carbide substrate; a p type area that is disposed at the inside of the n− type epitaxial layer and that is extended in a direction perpendicular to the n type pillar areas; a plurality of p+ areas in which the n− type epitaxial layer is disposed at a surface thereof and that are separated from the n type pillar areas and the p type area; a schottky electrode that is disposed on the n− type epitaxial layer and the p+ areas; and an ohmic electrode that is disposed at a second surface of the n+ type silicon carbide substrate.
申请公布号 US9159847(B2) 申请公布日期 2015.10.13
申请号 US201314098359 申请日期 2013.12.05
申请人 HYUNDAI MOTOR COMPANY 发明人 Lee Jong Seok;Hong Kyoung-Kook;Chun Dae Hwan;Jung Youngkyun
分类号 H01L31/0312;H01L29/872;H01L29/16;H01L29/66;H01L29/06;H01L29/08 主分类号 H01L31/0312
代理机构 McDermott Will & Emery LLP 代理人 McDermott Will & Emery LLP
主权项 1. A schottky barrier diode, comprising: an n− type epitaxial layer that is disposed at a first surface of an n+ type silicon carbide substrate; a plurality of n type pillar areas that are disposed at an inside of the n− type epitaxial layer and that are disposed at a first portion of the first surface of the n+ type silicon carbide substrate; a p type area that is disposed at the inside of the n− type epitaxial layer and that is extended in a direction perpendicular to the n type pillar areas; a plurality of p+ areas in which the n− type epitaxial layer is disposed at a surface thereof and that are separated from the n type pillar areas and the p type area; a schottky electrode that is disposed on the n− type epitaxial layer and the p+ areas; and an ohmic electrode that is disposed at a second surface of the n+ type silicon carbide substrate, wherein the p type area is disposed between an upper surface of the n type pillar areas and the first surface of the n+ type silicon carbide substrate.
地址 Seoul KR