发明名称 |
Schottky barrier diode and method of manufacturing the same |
摘要 |
A schottky barrier diode includes: an n− type epitaxial layer that is disposed at a first surface of an n+ type silicon carbide substrate; a plurality of n type pillar areas that are disposed at the inside of the n− type epitaxial layer and that are disposed at a first portion of the first surface of the n+ type silicon carbide substrate; a p type area that is disposed at the inside of the n− type epitaxial layer and that is extended in a direction perpendicular to the n type pillar areas; a plurality of p+ areas in which the n− type epitaxial layer is disposed at a surface thereof and that are separated from the n type pillar areas and the p type area; a schottky electrode that is disposed on the n− type epitaxial layer and the p+ areas; and an ohmic electrode that is disposed at a second surface of the n+ type silicon carbide substrate. |
申请公布号 |
US9159847(B2) |
申请公布日期 |
2015.10.13 |
申请号 |
US201314098359 |
申请日期 |
2013.12.05 |
申请人 |
HYUNDAI MOTOR COMPANY |
发明人 |
Lee Jong Seok;Hong Kyoung-Kook;Chun Dae Hwan;Jung Youngkyun |
分类号 |
H01L31/0312;H01L29/872;H01L29/16;H01L29/66;H01L29/06;H01L29/08 |
主分类号 |
H01L31/0312 |
代理机构 |
McDermott Will & Emery LLP |
代理人 |
McDermott Will & Emery LLP |
主权项 |
1. A schottky barrier diode, comprising:
an n− type epitaxial layer that is disposed at a first surface of an n+ type silicon carbide substrate; a plurality of n type pillar areas that are disposed at an inside of the n− type epitaxial layer and that are disposed at a first portion of the first surface of the n+ type silicon carbide substrate; a p type area that is disposed at the inside of the n− type epitaxial layer and that is extended in a direction perpendicular to the n type pillar areas; a plurality of p+ areas in which the n− type epitaxial layer is disposed at a surface thereof and that are separated from the n type pillar areas and the p type area; a schottky electrode that is disposed on the n− type epitaxial layer and the p+ areas; and an ohmic electrode that is disposed at a second surface of the n+ type silicon carbide substrate, wherein the p type area is disposed between an upper surface of the n type pillar areas and the first surface of the n+ type silicon carbide substrate. |
地址 |
Seoul KR |