发明名称 |
Sample carrier for an electron microscope |
摘要 |
The invention relates to a sample carrier for a transmission electron microscope. When using state of the art sample carriers, such as half-moon grids in combination with detectors detecting, for example, X-rays emitted at a large emittance angle, shadowing is a problem. Similar problems occur when performing tomography, in which the sample is rotated over a large angle.;The invention provides a solution to shadowing by forming the parts of the grid bordering the interface between sample and grid as tapering parts. |
申请公布号 |
US9159531(B2) |
申请公布日期 |
2015.10.13 |
申请号 |
US201414154753 |
申请日期 |
2014.01.14 |
申请人 |
FEI Company |
发明人 |
Nederlof Frank |
分类号 |
H01J37/20;G01N23/22;G01N23/225 |
主分类号 |
H01J37/20 |
代理机构 |
Scheinberg & Associates, PC |
代理人 |
Scheinberg & Associates, PC ;Scheinberg Michael O.;Hillert John E. |
主权项 |
1. A sample carrier for carrying a sample in an electron microscope, the sample carrier comprising a metal foil, the sample carrier comprising at least one mounting position on a lateral side of a tapered portion of the metal foil for attaching a sample thereto, wherein the at least one mounting position borders a part of the sample carrier in which a thickness of the metal foil is reduced, wherein the part comprises the tapered portion, and wherein the lateral side of the metal foil is substantially not parallel to a flat of the sample carrier. |
地址 |
Hillsboro OR US |