Nanotube structure based metal damascene process

摘要

In various embodiments a method for manufacturing a metallization layer on a substrate is provided, wherein the method may include forming a plurality of groups of nanotubes over a substrate, wherein the groups of nanotubes may be arranged such that a portion of the substrate is exposed and forming metal over the exposed portion of the substrate between the plurality of groups of nanotubes.

主权项

1. A method for manufacturing a metallization layer on a substrate, the method comprising:
forming an adhesion promoting layer on the substrate; providing a separate substrate with fully grown nanotubes; transferring the full grown nanotubes from the separate substrate onto the adhesion promoting layer; forming a plurality of groups of nanotubes from the nanotubes transferred from the separate substrate over the substrate, wherein the groups of nanotubes are arranged such that a portion of the substrate is exposed; and forming metal over the exposed portion of the substrate between the groups of nanotubes.