Micro-pump

摘要

There is provided a micro-pump including: a bottom substrate; a flow path forming substrate coupled to the bottom substrate and including an inlet having a fluid introduced therein and an outlet having the fluid ejected therefrom; and a valve substrate coupled to the flow path forming substrate and including at least one valve controlling the fluid to be introduced and ejected.

主权项

1. A micro-pump comprising:
a bottom substrate; a flow path forming substrate coupled to the bottom substrate and including an inlet having a fluid introduced therein and an outlet having the fluid ejected therefrom; and a valve substrate coupled to the flow path forming substrate and including at least one valve controlling the fluid to be introduced and ejected,
wherein a first hole connected to the inlet and a second hole connected to the outlet are formed in the valve substrate; andthe valve is installed in at least one of the first hole and the second hole,wherein the valve includes:a thin film member;a first opening and closing member formed by a first cutting line to cut one part of the thin film member; anda second opening and closing member formed by a second cutting line to cut the other part of the thin film member;wherein the thin film member is formed of an elastic material; andareas of the first opening and closing member and the second opening and closing member are different from each other.