Optical wavelength dispersion device and method of manufacturing the same

摘要

An optical wavelength dispersion device includes a first substrate; an input unit formed on the first substrate having a slit for receiving an optical signal; a grating formed on the first substrate for producing a first light beam form the optical signal for outputting; and a second substrate covered on the top of the input unit and the grating; wherein the input unit and the grating are formed from a photo-resist layer by high energy light source exposure.

主权项

1. A method of manufacturing an optical wavelength dispersion device, the method comprising the steps of:
(a) providing a first substrate; (b) forming a photo-resist layer on said first substrate; (c) exposing said photo-resist layer by high energy light source through a high-energy-light-source mask, wherein a wavelength of said high energy light source is from 0.01 to 100 nm; (d) developing said photo-resist layer for forming an input unit with a slit and a grating; (e) coating a reflective layer on a surface of each of said first substrate, said input unit and said grating; and (f) covering a second substrate on top of said input unit and said grating.