| 摘要 |
The present invention relates to a planar waveguide-based multichannel Mach-Zehnder type Fourier transform spectrometer and a measuring device using the same. The spectrometer includes a light lantern part branching light, emitted through a light input terminal, through multiple main branch waveguides formed in a planar waveguide structure corresponding to the number of channels; a planar waveguide type multichannel Mach-Zehnder part including a front end light waveguide connected to the main branch waveguides of the light lantern part and guiding light, a reference light waveguide having a reference path length from the front end light waveguide, and an increment light waveguide having a set path increment for the reference light waveguide in order to branch the light, emitted through the front end light waveguide, to the reference light waveguide and the increment light waveguide, and formed in a planar waveguide structure to output the light, passing via the reference light waveguide and the increment light waveguide, through the waveguide output terminal by coupling the light; a detector part detecting the light, outputted each of the output terminals of the multichannel Mach-Zehnder part; and a signal processing part processing a signal outputted from the detector part. Therefore, according to the planar waveguide-based multichannel Mach-Zehnder type Fourier transform spectrometer and the measuring device using the same, a simple structure and a thin shape are possible in the planar waveguide type, and a light insertion loss is suppressed. |
