Radiation entry window for a radiation detector

摘要

The invention concerns a radiation entry window (10) for a radiation detector (2), in particular for a semiconductor drift detector (2), with a flat window element (11), which is at least partially permeable for the radiation to be detected by the radiation detector (2), as well as with a window frame (12), which laterally frames the window element (11), wherein the window frame (12) consists of a semiconductor material and is considerably thicker than the window element (11). (FIG. 1)

主权项

1. A radiation entry window for a radiation detector, comprising:
(a) a flat window element, which is at least partially permeable for radiation to be detected by the radiation detector; and (b) a window frame, which laterally frames the window element, wherein:
(i) the window frame consists of a semiconductor material and is thicker than the window element;(ii) the window frame is manufactured in planar technology in a semiconductor process;(iii) the window frame is connected quasi monolithically with the window element; and(iv) the window frame has a substantially isosceles trapezoidal cross-section which widens toward the window element; andwherein the radiation entry window is separated from a panel comprising several radiation entry windows.