Turbo molecular pump device

摘要

A control unit, which is integrally mounted on a turbo molecular pump, is provided, in which the control unit can be miniaturized or the manufacturing costs are reduced. An upper casing (12) is fastened on a first mounting member (91) of an external device through a fastening member (61) inserted in a through hole (51) of a flange plate (12a). A first base (14) fastened on the upper casing (12) is fastened on a second mounting member (92) of the external device through a fastening member (63) inserted in a through hole (52) of a flange plate (14b). A control unit (70) is fastened on a second base (15) through a fastening member (65). Since torque produced when a rotor (30) is damaged is not asserted to the fastening member (65), strength of the fastening member (65) and a casing of the control unit (70) is small.

主权项

1. A turbo molecular pump device, comprising:
a turbo molecular pump, including a casing member and a rotor which is accommodated in the casing member, so as to transport gas molecules from an inlet to an outlet of the casing member through high speed rotation of the rotor; and a control unit, driving and controlling the turbo molecular pump; wherein a first mounting portion and a second mounting portion are formed in the casing member, the first mounting portion is disposed at a side of the inlet in order for the turbo molecular pump to be mounted on an external device different from the turbo molecular pump, and the second mounting portion is disposed at a side of the outlet in order for the turbo molecular pump to be mounted on an external device different from the turbo molecular pump, and the turbo molecular pump and the control unit are fixed through fastening members.