Nonvolatile memory element and method of manufacturing nonvolatile memory element

摘要

A nonvolatile memory element includes: a first electrode; a second electrode; and a variable resistance layer between the first and second electrodes. The variable resistance layer having a resistance value that reversibly changes according to an electrical signal provided between the electrodes. The variable resistance layer includes a first variable resistance layer and a second variable resistance layer. The first variable resistance layer comprises a first metal oxide. The second variable resistance layer is planar and includes a first part and a second part. The first part comprises a second metal oxide and is planar. The second part comprises an insulator and is planar. The second metal oxide has a lower oxygen deficient degree than that of the first metal oxide. The first and second parts are in contact with different parts of a main surface of the first variable resistance layer which faces the second variable resistance layer.

主权项

1. A nonvolatile memory element, comprising:
a first electrode; a second electrode; and a variable resistance layer between the first electrode and the second electrode, the variable resistance layer having a resistance value that reversibly changes according to an electrical signal applied between the first electrode and the second electrode, wherein the variable resistance layer includes at least a first variable resistance layer and a second variable resistance layer, the first variable resistance layer comprises a first metal oxide, the second variable resistance layer is planar and includes a first part and a second part, the first part comprising a second metal oxide and being planar, and the second part comprising an insulator and being planar, the second metal oxide has a lower oxygen deficient degree than an oxygen deficient degree of the first metal oxide, and the first part and the second part of the second variable resistance layer are in contact with different parts of a main surface of the first variable resistance layer, the main surface facing the second variable resistance layer.