发明名称 |
Semiconductor device with HCI protection region |
摘要 |
A device includes a semiconductor substrate, a drift region in the semiconductor substrate and having a first conductivity type, an isolation region within the drift region, and around which charge carriers drift on a path through the drift region during operation, and a protection region adjacent the isolation region in the semiconductor substrate, having a second conductivity type, and disposed along a surface of the semiconductor substrate. |
申请公布号 |
US9159803(B2) |
申请公布日期 |
2015.10.13 |
申请号 |
US201213590995 |
申请日期 |
2012.08.21 |
申请人 |
Freescale Semiconductor, Inc. |
发明人 |
Min Won Gi;Yang Hongning;Zuo Jiangkai |
分类号 |
H01L29/78;H01L29/66;H01L29/06;H01L29/40;H01L29/08;H01L29/10 |
主分类号 |
H01L29/78 |
代理机构 |
Lempia Summerfield Katz LLC |
代理人 |
Lempia Summerfield Katz LLC |
主权项 |
1. A device comprising:
a semiconductor substrate; a drift region in the semiconductor substrate and having a first conductivity type; a gate structure supported by the semiconductor substrate and comprising sidewall spacers; an isolation region within the drift region, laterally spaced from the gate structure, and around which charge carriers drift on a path through the drift region during operation; and a protection region having a second conductivity type, and disposed along a surface of the semiconductor substrate at a position adjacent the isolation region and in which at least a part of the protection region is both disposed along a channel-side sidewall of the isolation region and not disposed under the gate structure. |
地址 |
Austin TX US |