发明名称 Methods of forming semiconductor device structures
摘要 A method of forming a semiconductor device structure comprises forming at least one reflective structure comprising at least two dielectric materials having different refractive indices over at least one radiation-sensitive structure, the at least one reflective structure configured to substantially reflect therefrom radiation within a predetermined wavelength range and to substantially transmit therethrough radiation within a different predetermined wavelength range. Additional methods of forming a semiconductor device structure are described. Semiconductor device structures are also described.
申请公布号 US9159677(B2) 申请公布日期 2015.10.13
申请号 US201213590928 申请日期 2012.08.21
申请人 Micron Technology, Inc. 发明人 Zhang Xinyu;Sugiura Soichi;Zeng Yu
分类号 H01L23/552;H01L23/532 主分类号 H01L23/552
代理机构 TraskBritt 代理人 TraskBritt
主权项 1. A method of forming a semiconductor device structure comprising forming at least one distributed Bragg reflector comprising at least three dielectric materials having different refractive indices than one another on an upper surface of a gate structure of a transistor and on an upper surface of an electrically insulative material laterally surrounding the gate structure, the at least one distributed Bragg reflector configured to substantially reflect therefrom radiation within a predetermined wavelength range and to substantially transmit therethrough radiation within a different predetermined wavelength range.
地址 Boise ID US