| 发明名称 | Microelectronic device testing apparatus and method | ||
| 摘要 | A microelectronic device tester has a mounting member (for mounting a device), a drive shaft connected to the mounting member, and a vibration shaft mechanically in communication with the drive shaft. The drive shaft and vibration shaft are non-coaxial, and the drive shaft has a drive shaft proximal end and a drive shaft distal end. The drive shaft proximal end is connected to the mounting member, and the drive shaft distal end terminates proximal of the entire vibration shaft. | ||
| 申请公布号 | US9157928(B2) | 申请公布日期 | 2015.10.13 |
| 申请号 | US201213423466 | 申请日期 | 2012.03.19 |
| 申请人 | Analog Devices, Inc. | 发明人 | Chen Wei;Tang Huy Khanh |
| 分类号 | G01P21/00;G01M7/04 | 主分类号 | G01P21/00 |
| 代理机构 | Sunstein Kann Murphy & Timbers LLP | 代理人 | Sunstein Kann Murphy & Timbers LLP |
| 主权项 | 1. A microelectronic device tester comprising: a mounting member for mounting a device, the mounting member having a substantial center; a drive shaft connected to the substantial center of the mounting member; and a vibration shaft mechanically in communication with the drive shaft, the drive shaft and vibration shaft being non-coaxial, the drive shaft forming a drive shaft projection on the mounting member, the vibration shaft forming a vibration shaft projection on the mounting member, at least a portion of the vibration shaft projection intersecting the drive shaft projection. | ||
| 地址 | Norwood MA US | ||