Method and apparatus for further purifying ultrapure water

摘要

Disclosed are a method for further purifying ultrapure water, according to which any impurities in ultrapure water can be stably removed to a high degree within a small space over a prolonged period; and an apparatus therefor. Ultrapure water introduced into an ultrapure-water purifying apparatus 10 passes through an ion exchange resin layer 5 in a lower chamber 1a. During this process, metal ions, for example, in the ultrapure water are removed by the ion exchange resin. The ultrapure water then passes through a perforated plate 4, flows into an upper chamber 1b, and permeates an ion exchange filter 6. During this process, metal ions and other impurities remaining unremoved by the ion exchange resin layer 5 are removed. Specifically, metal ions are removed to a certain extent by the ion exchange resin, so that it is enough for the ion exchange filter provided downstream thereof to remove an extremely small amount of metal ions. Consequently, reaching of the ion exchange filter to breakthrough within a short period can be prevented, thereby attaining further purification of ultrapure water over a prolonged period of time.

主权项

1. An apparatus for purifying ultrapure water, which is connected to an ultrapure-water inlet of an institution in which the ultrapure water is to be used, wherein the apparatus comprises:
a subsystem which produces ultrapure water, comprising:
a UV oxidation unit;an ion exchange unit; andan ultrafiltration membrane system connected in series so that the ultrapure water is provided by the subsystem; and a purifying device which is separate from the subsystem and connected to the subsystem to receive the ultrapure water therefrom, the purifying device comprising:
an ion exchange resin layer including a granular ion exchange resin comprising a cation exchange resin alone or in combination with an anion exchange resin, the ion exchange resin having a particle diameter of 100 μm or more;an ion exchange filter arranged downstream from the ion exchange resin layer and including an ion exchanging membrane filter to remove metal ions and other impurities unremoved by the ion exchange resin layer, and a microparticle removal membrane arranged downstream from the ion exchange membrane filter to remove microparticles; anda housing retaining the ion exchange resin layer and the ion exchange filter so that further purified ultrapure water is provided by the purifying device, wherein the housing comprises an elongate vessel, the vessel having:
an inlet at a bottom of the vessel for receiving ultrapure water from the subsystem;a resin bed at the bottom of the vessel containing the ion exchange resin, the resin bed having perforated plates at the upstream and downstream ends thereof so that ultrapure water from the inlet passes through the resin bed;an upper chamber in constant fluid communication with a downstream end of the resin bed, the ion exchange filter being disposed in a central portion of the upper chamber so as to define an elongate hollow center into which water from the upper chamber permeates via the ion exchange filter; andan outlet in constant fluid communication with the hollow center, and the ion exchange filter is arranged in the housing to form an open space between an inner surface of the housing and an outer surface of the ion exchange filter.