发明名称 EVAPORATOR HAVING A SHUTTER FOR OPENING AND CLOSING AND CENTRAL PASSAGE FOR HOLDING THE STATE OF A SINGLE SPRAY
摘要 According to an embodiment of the present invention, an evaporator includes: two or more nozzles which are connected to a source storing deposition liquid to spray the deposition liquid; a heating chamber which heats the deposition liquid sprayed from the nozzles and evaporates the deposition liquid to deposition gas; a shutter module which is arranged on a side of the heating chamber to control one of the nozzles to be opened; and a center path which is attached on the ceiling of the heating chamber to provide a path in order to spray the deposition gas to the center of the heating chamber′s ceiling; and an exhaust port for discharging the deposition gas to the outside of the heating chamber. The present invention can provide an evaporator capable of maintaining the same evaporation state regardless of which one of the shutters is open.
申请公布号 KR20150114100(A) 申请公布日期 2015.10.12
申请号 KR20140037890 申请日期 2014.03.31
申请人 发明人
分类号 H01L21/205;H01L21/02 主分类号 H01L21/205
代理机构 代理人
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