| 摘要 |
The present invention relates to a cryopump system of a variable capacity cryocompressor using a storage tank and, more specifically, to a variable capacity cryocompressor apparatus to control a refrigerant flow supplied to a cryopump by a recycling process of the cryopump and setting the temperature and pressure in a cooling operation step and reducing power consumption consumed by the cryocompressor. In the cryopump, which forms a refrigerator (11), a cryocooler motor (12), a first cryo panel (17), and a second cryo panel (18), installs a second cryo panel temperature sensor (13), a first cryo panel temperature sensor (14), and a pressure sensor (15), and forms a high vacuum by absorbing and condensing gas and moisture, the present invention for the same installs the variable capacity cryocompressor (20) to monitor the temperature and pressure of the cryopump and control the helium refrigerant flow according to the cryopump state in the cryopump, and connects a helium supply line (41) for supplying a helium refrigerant which is compressed from the variable capacity cryocompressor (20) with a helium collection line (42) for collecting the low pressure helium refrigerant to the variable capacity cryocompressor (20) between the cryopump and the cryocompressor. |
